SRS-2010  Spreading Resistance Measurement System using slant polished substrates

Description:

• Maps Resitivity with depth through wafer,
• Thickness of epitaxial layers ,
• Depth of PN junction
• Carrier density profiles.

Applications:
Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)

Sample sizes:
Please contact us in details

Measuring range:
1~10E+9 Ω[Spread resistance]

Carrier density range: 
2E+13 ~ 5E+19 cm2 [N-type silicon]
2E+14 ~ 7E+19 cm2  [P-type silicon]