Resistivity Reference Wafer : NRW Series
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DESCRIPTION: NRW series are resistivity reference wafers which are calibrated and traceable for Napson’s resistivity measurement systems. NRW series use neutron irradiated wafers for excellent stability.APPLICATIONS: Napson’s four-probe resistivity measurement systems are calibrated by standard wafers (NIST, VLSI), and conform to the standards stipulated by SEMI standards, Japanese Industrial Standards (JIS) and American Materials Testing Association (ASTM). SPECIFICATIONS: See Specification Table ------> <Material> Silicon <Production method> FZ <Wafer finish frontside/backside> Lapped <Wafer orientation> (1-1-1) ± 1 deg. <Doping> N-type (Phosphorous) <Wafer size> Φ100mm (4 inch) <Wafer Thickness> *Depends on NRW wafer type. Please refer following specs. |
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