Resistivity Reference Wafer : NRW Series
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DESCRIPTION: NRW series are resistivity reference wafers which are calibrated and tracable for Napson’s resistivity measurement systems. NRW series use neutron irradiatiated wafers for excellent stability.APPLICATIONS: Napson’s four-probe resistivity measurement systems are calibrated by standard wafers (NIST, VLSI), and conform to the standards stipulated by SEMI standards, Japanese Industrial Standards (JIS) and American Materials Testing Association (ASTM). SPECIFICATIONS: See SpecificationTable ------> <Material> Silicon <Production method> FZ <Wafer finish frontside/backside> Lapped <Wafer orientation> (1-1-1) ± 1 deg. <Doping> N-type (Phosphorous) <Wafer size> Φ100mm(4inch) <Wafer Thickness> *Depends on NRW wafer type. Please refer following specs. |
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