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Spreading Resistance Profiling

Resistivity profiling of slant polished wafers

SRS-2010 Spreading Resistance Measurment of profile through wafer cross section

Description SRS-2010

  • Measures the resistivity cross sectional profile of semiconductor wafers using slant polished samples

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Applications

  • Semiconductors and Solar Cell Materials

  • Determine Carrier Densities from Resistivity/Carrier Density Tables

 

 

Sample sizes:

  • Slant pollished wafer samples, contact us for details and preparation tools.


Measuring range

  • 1~10E+9 Ω[Spread restance]

  • Carrier density range:2E+13 ~ 5E+19 cm2 [N-type silicon]
    2E+14 ~ 7E+19 cm2 [P-type silicon]

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