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Point Contact Probing

Systems for measuring  Sheet Resistance and Resistivity

Hand Held 4 point resistance probe

RT-70V / TS-7D
Tester + Hand-held 4-point probe
 

Controlled contact 4 point probe - electric actuation

RT-70V/ RG-7C
Tester with Motorized Z Axis
 

Controlled contact 4 point probe - manual actuation

RT-70V / RG-5
Tester + Manual Z axis

Controlled contact 4 point probe - electric actuation for large samples

RT-70V / RG-7S
Tester + Manual X-Y -Z axes

Measurement tester ; RT-70V 

  • Thickness input with easy JOG dial operation (RT-70V )

  • Tester self-test function/Auto change-over measurement range function


Choose from the following stage models for your purpose & applications:


Measurement stage

  • (1) RG-7C: Motorized probe up-down stroke.

  • (2) RG-5: Manual probe up-down stroke by hand lever.

  • (3) RG-7S: Motorized probe up-down stroke for larger Glass or Film samples with manual X-Y universal stage.

  • (4) TS-7D: Hand held four point probe measurement instrument.  *Stage plate is an option.

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Applications

  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)

  • Silicon on Insulator

  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)

  • Conductive thin film (Metal, ITO etc)

  • Diffused sample (or layer)

  • Silicon-related thin films (LTPS etc), IGZO

  • Silicon-related epitaxial materials, Ion-implantation sample

  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)

  • Others (*Please contact us for details)


Sample sizes: Depend on measurement stage.
Up to <Circle> 300mm(12 inch) or <Square> 730x920mm size.

Measuring range: [R] 1μ~3M Ω・cm,  [RS] 5m~10M Ω/sq

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