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Non-Contact Resistance Probes

Non-Contact Probe Systems for measuring Sheet Resistance and Resistivity

Non contact portable resistance measurement system
Non contact sheet resistance benchtop measurement
non contact  ultra-low sheet resistance measurement

EC-80P (Portable)

Description

  • Auto-measurement is started by probe sensing the sample

  • 3 measurement modes for wafer resistivity, bulk resistivity and sheet resistance

  • Easy set up of measurement conditions with the JOG dial

  • 5 probe ranges are available

  • 2 Probes can be connected simultaneously.

Applications

  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)

  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)

  • Conductive thin film (Metal, ITO etc)

  • Silicon-related epitaxial materials, Ion-implantation sample

  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)

  • Others (*Please contact us for details)


Sample size: Any size and shape can be measured(*Larger than 20mmφ and measurement plane must be flat)

Measuring range: 
[R] 0.001 ~ 200 Ω・cm
[RS] 0.01 ~ 1,000 Ω/sq* The probe ranges are Low, Middle, High, S-High, Solar-wafer.

EC-80

Description

  • Easy operation and compact design

  • Auto-measurement starts by inserting the wafer under the probe

  • Easy set up to measurement conditions  with JOG dial

  • 5 model types for each measuring range

Applications

  • Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)

  • New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)

  • Conductive thin film (Metal, ITO etc)

  • Silicon-related epitaxial materials, Ion-implantation sample

  • Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)

  • Others (*Please contact us for details)


Sample size: 8 inch, 156x156mm

Measuring range [R] 0.001 ~ 200 Ω・cm
[RS] 0.01 ~ 3,000 Ω/sq
* The model type is selected from either Low, Middle, High and S-High ranges.

PVE-80

Description

  • No contact measurement using Pulse-Voltage excitation

  • Very low conductivity range to 50 μΩ to 1 mΩ/sq

  • Easy operation and data processing with PC Software

  • Calculates Sheet resistance[Ohm/Sq], Electric conductivity[S/cm], Electrical conduction[S]

  • *Pulse-Voltage excitation method : Pat. No.5386394

  •   Joint development with Chiba Univ.

​​ Applications

  • Novel materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)

  • Conductive thin film (Metal, ITO etc)

  • Others (*Please contact us for details)


Sample sizes~W300 x D210mm

Measuring range: ​ 50μ ~ 1m Ω/sq

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