Stein Labs
Stein Labs, LLC is your North American Connection for Napson Corporation
Wafer Mapping - Non Contact
Multi-Point Mapping System for measuring Sheet Resistance and Resistivity
NC-80MAP
Description
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Possible to measure wide range of sheet resistance by installing Max. 4 probes
Min. 8 mm position from edge can be measured
User programmable measurement pattern & programmable measuring pattern
*Option: thickness measurement probe (for silicon wafer)
Applications
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Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
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New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
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Conductive thin film (Metal, ITO etc)
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Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
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Others (*Please contact us for details)
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Silicon-related epitaxial materials, Ion-implantation sample
Sample sizes:
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2 ~ 8 inch (Option; 12 inch)
Measuring range
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[R] 1m ~ 200 Ω・cm
[RS] 10m ~ 3,000 Ω/sq
* The range is separated from each Low, Middle, High and S-High probe type.
*Please refer the measurement range for each probe type as below;
(1)Low:0.01~0.5Ω/□(0.001~0.05Ω·cm)
(2)Middle:0.5~10Ω/□(0.05~0.5Ω·cm)
(3)High:10~1000Ω/□(0.5~60Ω·cm)
(4)S-High:1000~3000Ω/□(60~200Ω·cm)
Size
W 780 × D 580 × H 375 mm
Approx. 70 kg